Western Nanofabrication Facility

The University of Western Ontario, London, Ontario
What the facility does

Nanofabrication, material characterization, material  deposition surface characterization, device fabrication

Area(s) of Expertise

Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using  a coherent suite of instrumentation.

Research Services

Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry

Sectors of Application
  • Aerospace and satellites
  • Automotive
  • Defence and security industries
  • Energy (renewable and fossil)
  • Manufacturing and processing
  • Mining, minerals and metals

Name of specialized lab

Name of equipment

Short description of function

Scanning electron microscope

LEO 1530

Scanning electron microscope

Scanninf electron microscope with FIB capabilities and elemental analysis

LEO 1540

Xray dispersion, focused ion beam carving for sample characaterization

Spin coater


Organic Thin film material deposition

PVD material deposition


Oxide and metal deposition

Electron beam deposition


Gold, Titanum , silver deposition



Surface characterization


Woolam Vase

Multiangle multi wavelength ellipsometer

HDMS oven


Changing hydrophobicity of surface

Mask aligner

Karl suss, MJB3,


Electroplating bath



Langmuir Blodgett trough


Monolayer film deposition



Deposition of silicondioxyde, silicon nitride, silicon oxynitride

STS Reactive ion etching



Gasonics Aura Oxygen Plasma Asher


microprocessor controlled downstream photoresist stripper

Alcatel 601 deep reactive ion etching


This system etches micron-scale patterns into silicon. 

Optical microscope microscope



Optical microscope for visual inspection of samples and surfaces

Stereozoom microscope

Leica MZ12.5

Stereozoom microscope

UV-Ozone cleaner


Ultra cleaning of surface vis UV-Ozone irradiation

Class 100 and 1000 clean room facility


Sample preparation in dractic clean space

Grey space for standard sample preparation


Sample preparation in less demanding clean space.


  • Scisense Inc.
  • Sciencetech Inc.
  • University of Western Ontario
  • University of Waterloo
  • Université de Montréal
  • Université Laval
  • University of Toronto
  • University of Windsor
  • McMaster University



Western Nanofabrication Newsletters


Western Nanofabrication Posters


Western Nanofabrication Publications