Western Nanofabrication Facility

The University of Western Ontario, London, Ontario
What the facility does

Nanofabrication, material characterization, material  deposition surface characterization, device fabrication

Area(s) of Expertise

Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using  a coherent suite of instrumentation.

Research Services

Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry

Sectors of Application
  • Aerospace and satellites
  • Automotive
  • Defense and security industries
  • Energy (renewable and fossil)
  • Manufacturing and processing
  • Mining, minerals and metals

Name of specialized lab

Name of equipment

Short description of function

Scanning electron microscope

LEO 1530

Scanning electron microscope

Scanninf electron microscope with FIB capabilities and elemental analysis

LEO 1540

Xray dispersion, focused ion beam carving for sample characaterization

Spin coater

CEE

Organic Thin film material deposition

PVD material deposition

 

Oxide and metal deposition

Electron beam deposition

 

Gold, Titanum , silver deposition

Profilometer

Tencor

Surface characterization

Ellipsometer

Woolam Vase

Multiangle multi wavelength ellipsometer

HDMS oven

 

Changing hydrophobicity of surface

Mask aligner

Karl suss, MJB3,

 

Electroplating bath

 

 

Langmuir Blodgett trough

KSV

Monolayer film deposition

STS PECVD

 

Deposition of silicondioxyde, silicon nitride, silicon oxynitride

STS Reactive ion etching

 

 

Gasonics Aura Oxygen Plasma Asher

Gasonics

microprocessor controlled downstream photoresist stripper

Alcatel 601 deep reactive ion etching

Alcatel

This system etches micron-scale patterns into silicon. 

Optical microscope microscope

 

Zeiss

Optical microscope for visual inspection of samples and surfaces

Stereozoom microscope

Leica MZ12.5

Stereozoom microscope

UV-Ozone cleaner

 

Ultra cleaning of surface vis UV-Ozone irradiation

Class 100 and 1000 clean room facility

 

Sample preparation in dractic clean space

Grey space for standard sample preparation

 

Sample preparation in less demanding clean space.

 

  • Scisense Inc.
  • Sciencetech Inc.
  • University of Western Ontario
  • University of Waterloo
  • Université de Montréal
  • Université Laval
  • University of Toronto
  • University of Windsor
  • McMaster University

Title

URL

Western Nanofabrication Newsletters

http://nanofab.uwo.ca/research/Newsletter.html

Western Nanofabrication Posters

http://nanofab.uwo.ca/research/posters.html

Western Nanofabrication Publications

http://nanofab.uwo.ca/research/publications.html