Western Nanofabrication Facility

Western University (The University of Western Ontario), London, Ontario
What the facility does

Nanofabrication, material characterization, material  deposition surface characterization, device fabrication

Areas of expertise

Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using  a coherent suite of instrumentation.

Research services

Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry

Sectors of application
  • Aerospace and satellites
  • Automotive
  • Defence and security industries
  • Energy
  • Manufacturing and processing
  • Mining, minerals and metals
Specialized lab Equipment Function
Scanning electron microscope LEO 1530 Scanning electron microscope
Scanninf electron microscope with FIB capabilities and elemental analysis LEO 1540 Xray dispersion, focused ion beam carving for sample characaterization
Spin coater CEE Organic Thin film material deposition
PVD material deposition   Oxide and metal deposition
Electron beam deposition   Gold, Titanum , silver deposition
Profilometer Tencor Surface characterization
Ellipsometer Woolam Vase Multiangle multi wavelength ellipsometer
HDMS oven   Changing hydrophobicity of surface
Mask aligner Karl suss, MJB3,  
Electroplating bath    
Langmuir Blodgett trough KSV Monolayer film deposition
STS PECVD   Deposition of silicondioxyde, silicon nitride, silicon oxynitride
STS Reactive ion etching    
Gasonics Aura Oxygen Plasma Asher Gasonics microprocessor controlled downstream photoresist stripper
Alcatel 601 deep reactive ion etching Alcatel This system etches micron-scale patterns into silicon. 

Optical microscope microscope


Zeiss Optical microscope for visual inspection of samples and surfaces
Stereozoom microscope Leica MZ12.5 Stereozoom microscope
UV-Ozone cleaner   Ultra cleaning of surface vis UV-Ozone irradiation
Class 100 and 1000 clean room facility   Sample preparation in dractic clean space
Grey space for standard sample preparation   Sample preparation in less demanding clean space.


  • Scisense Inc.
  • Sciencetech Inc.
  • University of Western Ontario
  • University of Waterloo
  • Université de Montréal
  • Université Laval
  • University of Toronto
  • University of Windsor
  • McMaster University
Title URL
Western Nanofabrication Newsletters http://nanofab.uwo.ca/research/Newsletter.html
Western Nanofabrication Posters http://nanofab.uwo.ca/research/posters.html
Western Nanofabrication Publications http://nanofab.uwo.ca/research/publications.html