What the facility does
Nanofabrication, material characterization, material deposition surface characterization, device fabrication
Areas of expertise
Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using a coherent suite of instrumentation.
Research services
Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry
Sectors of application
- Aerospace and satellites
- Automotive
- Defence and security industries
- Energy
- Manufacturing and processing
- Mining, minerals and metals
Specialized labs and equipment
| Specialized lab | Equipment | Function |
|---|---|---|
| Scanning electron microscope | LEO 1530 | Scanning electron microscope |
| Scanninf electron microscope with FIB capabilities and elemental analysis | LEO 1540 | Xray dispersion, focused ion beam carving for sample characaterization |
| Spin coater | CEE | Organic Thin film material deposition |
| PVD material deposition | Oxide and metal deposition | |
| Electron beam deposition | Gold, Titanum , silver deposition | |
| Profilometer | Tencor | Surface characterization |
| Ellipsometer | Woolam Vase | Multiangle multi wavelength ellipsometer |
| HDMS oven | Changing hydrophobicity of surface | |
| Mask aligner | Karl suss, MJB3, | |
| Electroplating bath | ||
| Langmuir Blodgett trough | KSV | Monolayer film deposition |
| STS PECVD | Deposition of silicondioxyde, silicon nitride, silicon oxynitride | |
| STS Reactive ion etching | ||
| Gasonics Aura Oxygen Plasma Asher | Gasonics | microprocessor controlled downstream photoresist stripper |
| Alcatel 601 deep reactive ion etching | Alcatel | This system etches micron-scale patterns into silicon. |
Optical microscope microscope
| Zeiss | Optical microscope for visual inspection of samples and surfaces |
| Stereozoom microscope | Leica MZ12.5 | Stereozoom microscope |
| UV-Ozone cleaner | Ultra cleaning of surface vis UV-Ozone irradiation | |
| Class 100 and 1000 clean room facility | Sample preparation in dractic clean space | |
| Grey space for standard sample preparation | Sample preparation in less demanding clean space. |
Private and public sector research partners
- Scisense Inc.
- Sciencetech Inc.
- University of Western Ontario
- University of Waterloo
- Université de Montréal
- Université Laval
- University of Toronto
- University of Windsor
- McMaster University
Additional information
| Title | URL |
|---|---|
| Western Nanofabrication Newsletters | http://nanofab.uwo.ca/research/Newsletter.html |
| Western Nanofabrication Posters | http://nanofab.uwo.ca/research/posters.html |
| Western Nanofabrication Publications | http://nanofab.uwo.ca/research/publications.html |