Nanofabrication, material characterization, material deposition surface characterization, device fabrication
Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using a coherent suite of instrumentation.
Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry
- Aerospace and satellites
- Automotive
- Defence and security industries
- Energy (renewable and fossil)
- Manufacturing and processing
- Mining, minerals and metals
Specialized labs and equipment
|
Specialized lab |
Equipment |
Function |
|---|---|---|
|
Scanning electron microscope |
LEO 1530 |
Scanning electron microscope |
|
Scanninf electron microscope with FIB capabilities and elemental analysis |
LEO 1540 |
Xray dispersion, focused ion beam carving for sample characaterization |
|
Spin coater |
CEE |
Organic Thin film material deposition |
|
PVD material deposition |
|
Oxide and metal deposition |
|
Electron beam deposition |
|
Gold, Titanum , silver deposition |
|
Profilometer |
Tencor |
Surface characterization |
|
Ellipsometer |
Woolam Vase |
Multiangle multi wavelength ellipsometer |
|
HDMS oven |
|
Changing hydrophobicity of surface |
|
Mask aligner |
Karl suss, MJB3, |
|
|
Electroplating bath |
|
|
|
Langmuir Blodgett trough |
KSV |
Monolayer film deposition |
|
STS PECVD |
|
Deposition of silicondioxyde, silicon nitride, silicon oxynitride |
|
STS Reactive ion etching |
|
|
|
Gasonics Aura Oxygen Plasma Asher |
Gasonics |
microprocessor controlled downstream photoresist stripper |
|
Alcatel 601 deep reactive ion etching |
Alcatel |
This system etches micron-scale patterns into silicon. |
|
Optical microscope microscope
|
Zeiss |
Optical microscope for visual inspection of samples and surfaces |
|
Stereozoom microscope |
Leica MZ12.5 |
Stereozoom microscope |
|
UV-Ozone cleaner |
|
Ultra cleaning of surface vis UV-Ozone irradiation |
|
Class 100 and 1000 clean room facility |
|
Sample preparation in dractic clean space |
|
Grey space for standard sample preparation |
|
Sample preparation in less demanding clean space. |
Private and public sector research partners
- Scisense Inc.
- Sciencetech Inc.
- University of Western Ontario
- University of Waterloo
- Université de Montréal
- Université Laval
- University of Toronto
- University of Windsor
- McMaster University
Additional information
|
Title |
URL |
|---|---|
|
Western Nanofabrication Newsletters |
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Western Nanofabrication Posters |
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Western Nanofabrication Publications |