Microfabrication cleanroom user facility providing tool access and services for applications such as biomedical science, space technologies, micro-electromechanical systems (MEMS) and electronics.
The York University Microfabrication Facility (YMF) is a gateway to cutting-edge micro- and nanotechnology solutions in the northern GTA and vicinity. YMF specializes in providing expertise in microfabrication processes, including lithography, thin-film deposition, etching, and characterization. What sets us apart is our state-of-the-art equipment and experienced staff. The semi-automatic UV LED mask aligner is one of its kind that can accommodate both research prototyping and short-run manufacturing. The photolithography film (transparency) mask printer is unique in academia to provide a solution for low-cost and high-quality photomasks. The physical vapor deposition (PVD) (eBeam evaporator and sputter system) and plasma-enhanced chemical vapor deposition (PECVD) systems are the most up-to-date instruments with the advanced and newest technologies. The team, consisting of PhDs with industrial backgrounds, can support every step of the microfabrication process.
- Photolithography film (transparency) mask printing
- Thin film deposition including a wide selection of metals (Au, Ag, Al, Cr, Ni, Cu, Ti, etc.) and other materials including conductors, semiconductors, and dielectrics (SiOx, SixNy, TiO2, ITO, etc.)
- Polydimethylsiloxane (PDMS) prototyping and SU8 master mould fabrication services, for example, for microfluidics
- Surface characterization service with a contact profilometer
- Lab and equipment access on a user fee basis for custom fabrication
- Aerospace and satellites
- Clean technology
- Information and communication technologies and media
- Life sciences, pharmaceuticals and medical equipment
- Manufacturing and processing
Specialized labs and equipment
| Specialized lab | Equipment | Function |
|---|---|---|
| Thin-film Processing Lab (TPL) | Trion Technology Minilock Duo III Inductively Coupled Plasma - Reactive Ion Etching (RIE-ICP) and plasma-enhanced chemical vapor deposition (PECVD) system | Deposition and dry etching of Si, SiOx and SixNy. Includes a loadlock with a robotic arm enabling seamless transfer between the deposition and the etching chamber. |
| Angstrom Engineering Nexdep eBeam Evaporator | Accommodates up 6 sources for a seamless multi-material deposition. Allows simultaneous deposition on up to three 4’’ silicon wafers with a dome. Features a variable angle stage for shadow deposition. | |
| Angstrom Engineering EvoVac Sputter Deposition System | 500mm x 500mm baseplate, with 3 direct current (DC) sputter sources and 3 radio frequency (RF) sputter sources for multi-material deposition, and a backplate RF sputter source for substrate cleaning. The system also features reactive sputtering for a more efficient deposition process of oxide materials. | |
| Keyence Digital Microscope, Model VHX-970F | Automatic microscopic tool featuring 20x – 2000x magnification, bright field/dark field/polarised/mixed lighting with a motorized z-stage for auto-focus and 3D profiling. | |
| Photolithography Lab (PLL) | OAI Enhanced Mask Aligner, Model 800E | Works with a substrate size of up to 8’’ diameter. Features a UV LED light source with both i-line and g-line wavelength, backside alignment capability, auto wedge effect compensation and auto-alignment utilising the latest pattern recognition technology from Cognex. |
| Laurell Spin Coater, Model 650-8N | Hosts a wafer size of up to 8" and has an alignment tool to assist mounting a wafer. | |
| Plasma Etch PE-50 XL Benchtop Low Pressure Plasma System | Plasma asher with oxygen plasma capability, a fully automated system for surface modification and light plasma cleaning. | |
| KLA Alpha-Step D-600 Stylus Profiler | Contact profilometer equipped with an 8" motorized stage, enabling auto-rasterization for surface topography with a height from 10nm to 1.2mm. | |
| DFMZ Wet Processing Bench, Model TXH-6 | Equipped with deionized (DI) water and compressed nitrogen. Internal environment is up to Class 100 condition. |
Private and public sector research partners
- ventureLAB
- CMC Microsystems
Additional information
| Title | Hyperlink |
|---|---|
| The York University Microfabrication Facility (YMF) in 30 Seconds. | https://www.youtube.com/watch?v=x_6-WsHgspA&list=TLGGftDJykqYNoUxODA0MjAyNA |
| Explore the York University Microfabrication Facility (YMF) at Lassonde School of Engineering. | https://www.youtube.com/watch?v=YS7r6gB7h5Y |